4/24/2011	8:17:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/24/2011	8:17:21 AM	Recipe started at 8:17 AM
4/24/2011	8:17:21 AM	H2 valve closed
4/24/2011	8:17:21 AM	BCl3 valve closed
4/24/2011	8:17:21 AM	PH3 valve closed
4/24/2011	8:17:21 AM	SiCl4 pre valve closed
4/24/2011	8:17:21 AM	SiCl4 post valve closed
4/24/2011	8:17:21 AM	Main Vac valve closed
4/24/2011	8:17:21 AM	Bypass valve closed
4/24/2011	8:17:21 AM	Bubbler valve closed
4/24/2011	8:17:21 AM	Helium valve opened
4/24/2011	8:17:21 AM	Helium MFC set to  500.000000
4/24/2011	8:17:21 AM	H2 MFC set to  0.000000
4/24/2011	8:17:21 AM	BCl3 MFC set to  0.000000
4/24/2011	8:17:21 AM	PHl3 MFC set to  0.000000
4/24/2011	8:17:21 AM	SiCl4 MFC set to  0.000000
4/24/2011	8:17:21 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	8:17:21 AM	Tube furnace set to 0
4/24/2011	8:18:41 AM	Helium valve closed
4/24/2011	8:18:41 AM	H2 valve closed
4/24/2011	8:18:41 AM	BCl3 valve closed
4/24/2011	8:18:41 AM	PH3 valve closed
4/24/2011	8:18:41 AM	SiCl4 pre valve closed
4/24/2011	8:18:41 AM	SiCl4 post valve closed
4/24/2011	8:18:41 AM	Main Vac valve closed
4/24/2011	8:18:41 AM	Bypass valve closed
4/24/2011	8:18:41 AM	Bubbler valve closed
4/24/2011	8:18:41 AM	Helium MFC set to  0.000000
4/24/2011	8:18:41 AM	H2 MFC set to  0.000000
4/24/2011	8:18:41 AM	BCl3 MFC set to  0.000000
4/24/2011	8:18:41 AM	PHl3 MFC set to  0.000000
4/24/2011	8:18:41 AM	SiCl4 MFC set to  0.000000
4/24/2011	8:18:41 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	8:18:41 AM	Tube furnace set to 0
4/24/2011	8:18:42 AM	Run finished at 8:18 AM
4/24/2011	8:18:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/24/2011	8:20:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/24/2011	8:20:47 AM	Recipe started at 8:20 AM
4/24/2011	8:20:47 AM	Helium valve closed
4/24/2011	8:20:47 AM	H2 valve closed
4/24/2011	8:20:47 AM	BCl3 valve closed
4/24/2011	8:20:47 AM	PH3 valve closed
4/24/2011	8:20:47 AM	SiCl4 pre valve closed
4/24/2011	8:20:47 AM	SiCl4 post valve closed
4/24/2011	8:20:47 AM	Main Vac valve closed
4/24/2011	8:20:47 AM	Bubbler valve closed
4/24/2011	8:20:47 AM	Bypass valve opened
4/24/2011	8:20:47 AM	Helium MFC set to  0.000000
4/24/2011	8:20:47 AM	H2 MFC set to  0.000000
4/24/2011	8:20:47 AM	BCl3 MFC set to  0.000000
4/24/2011	8:20:47 AM	PHl3 MFC set to  0.000000
4/24/2011	8:20:47 AM	SiCl4 MFC set to  0.000000
4/24/2011	8:20:47 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	8:20:47 AM	Tube furnace set to 0
4/24/2011	8:21:18 AM	Helium valve closed
4/24/2011	8:21:18 AM	H2 valve closed
4/24/2011	8:21:19 AM	BCl3 valve closed
4/24/2011	8:21:19 AM	PH3 valve closed
4/24/2011	8:21:19 AM	SiCl4 pre valve closed
4/24/2011	8:21:19 AM	SiCl4 post valve closed
4/24/2011	8:21:19 AM	Bubbler valve closed
4/24/2011	8:21:19 AM	Main Vac valve opened
4/24/2011	8:21:19 AM	Bypass valve opened
4/24/2011	8:21:19 AM	Helium MFC set to  0.000000
4/24/2011	8:21:19 AM	H2 MFC set to  0.000000
4/24/2011	8:21:19 AM	BCl3 MFC set to  0.000000
4/24/2011	8:21:19 AM	PHl3 MFC set to  0.000000
4/24/2011	8:21:19 AM	SiCl4 MFC set to  0.000000
4/24/2011	8:21:19 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	8:21:19 AM	Tube furnace set to 0
4/24/2011	8:21:19 AM	Run finished at 8:21 AM
4/24/2011	8:21:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/24/2011	9:05:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/24/2011	9:05:13 AM	Recipe started at 9:05 AM
4/24/2011	9:05:13 AM	H2 valve closed
4/24/2011	9:05:13 AM	BCl3 valve closed
4/24/2011	9:05:13 AM	PH3 valve closed
4/24/2011	9:05:13 AM	SiCl4 pre valve closed
4/24/2011	9:05:13 AM	SiCl4 post valve closed
4/24/2011	9:05:13 AM	Main Vac valve closed
4/24/2011	9:05:13 AM	Bypass valve closed
4/24/2011	9:05:13 AM	Bubbler valve closed
4/24/2011	9:05:13 AM	Helium valve opened
4/24/2011	9:05:13 AM	Helium MFC set to  500.000000
4/24/2011	9:05:13 AM	H2 MFC set to  0.000000
4/24/2011	9:05:13 AM	BCl3 MFC set to  0.000000
4/24/2011	9:05:13 AM	PHl3 MFC set to  0.000000
4/24/2011	9:05:13 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:05:13 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:05:14 AM	Tube furnace set to 0
4/24/2011	9:06:34 AM	Helium valve closed
4/24/2011	9:06:34 AM	H2 valve closed
4/24/2011	9:06:34 AM	BCl3 valve closed
4/24/2011	9:06:34 AM	PH3 valve closed
4/24/2011	9:06:34 AM	SiCl4 pre valve closed
4/24/2011	9:06:34 AM	SiCl4 post valve closed
4/24/2011	9:06:34 AM	Main Vac valve closed
4/24/2011	9:06:34 AM	Bypass valve closed
4/24/2011	9:06:34 AM	Bubbler valve closed
4/24/2011	9:06:34 AM	Helium MFC set to  0.000000
4/24/2011	9:06:34 AM	H2 MFC set to  0.000000
4/24/2011	9:06:34 AM	BCl3 MFC set to  0.000000
4/24/2011	9:06:34 AM	PHl3 MFC set to  0.000000
4/24/2011	9:06:34 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:06:34 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:06:34 AM	Tube furnace set to 0
4/24/2011	9:06:34 AM	Run finished at 9:06 AM
4/24/2011	9:06:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/24/2011	9:16:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/24/2011	9:16:19 AM	Recipe started at 9:16 AM
4/24/2011	9:16:19 AM	Helium valve closed
4/24/2011	9:16:19 AM	H2 valve closed
4/24/2011	9:16:19 AM	BCl3 valve closed
4/24/2011	9:16:19 AM	PH3 valve closed
4/24/2011	9:16:19 AM	SiCl4 pre valve closed
4/24/2011	9:16:19 AM	SiCl4 post valve closed
4/24/2011	9:16:19 AM	Main Vac valve closed
4/24/2011	9:16:19 AM	Bubbler valve closed
4/24/2011	9:16:19 AM	Bypass valve opened
4/24/2011	9:16:19 AM	Helium MFC set to  0.000000
4/24/2011	9:16:19 AM	H2 MFC set to  0.000000
4/24/2011	9:16:19 AM	BCl3 MFC set to  0.000000
4/24/2011	9:16:19 AM	PHl3 MFC set to  0.000000
4/24/2011	9:16:19 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:16:19 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:16:19 AM	Tube furnace set to 0
4/24/2011	9:16:50 AM	Helium valve closed
4/24/2011	9:16:50 AM	H2 valve closed
4/24/2011	9:16:50 AM	BCl3 valve closed
4/24/2011	9:16:50 AM	PH3 valve closed
4/24/2011	9:16:50 AM	SiCl4 pre valve closed
4/24/2011	9:16:50 AM	SiCl4 post valve closed
4/24/2011	9:16:50 AM	Bubbler valve closed
4/24/2011	9:16:50 AM	Main Vac valve opened
4/24/2011	9:16:50 AM	Bypass valve opened
4/24/2011	9:16:50 AM	Helium MFC set to  0.000000
4/24/2011	9:16:50 AM	H2 MFC set to  0.000000
4/24/2011	9:16:50 AM	BCl3 MFC set to  0.000000
4/24/2011	9:16:50 AM	PHl3 MFC set to  0.000000
4/24/2011	9:16:50 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:16:50 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:16:50 AM	Tube furnace set to 0
4/24/2011	9:16:51 AM	Run finished at 9:16 AM
4/24/2011	9:16:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/24/2011	9:17:33 AM	Helium valve opened
4/24/2011	9:17:37 AM	Helium MFC set to  100.000000
4/24/2011	9:19:13 AM	Helium valve closed
4/24/2011	9:19:15 AM	Helium MFC set to  0.000000
4/24/2011	9:19:35 AM	Recipe started at 9:19 AM
4/24/2011	9:19:35 AM	BCl3 valve closed
4/24/2011	9:19:35 AM	PH3 valve closed
4/24/2011	9:19:35 AM	SiCl4 pre valve closed
4/24/2011	9:19:35 AM	SiCl4 post valve closed
4/24/2011	9:19:35 AM	Main Vac valve closed
4/24/2011	9:19:35 AM	Bypass valve closed
4/24/2011	9:19:35 AM	Bubbler valve closed
4/24/2011	9:19:35 AM	Helium valve opened
4/24/2011	9:19:35 AM	H2 valve opened
4/24/2011	9:19:35 AM	Helium MFC set to  190.000000
4/24/2011	9:19:35 AM	H2 MFC set to  10.000000
4/24/2011	9:19:35 AM	BCl3 MFC set to  0.000000
4/24/2011	9:19:35 AM	PHl3 MFC set to  0.000000
4/24/2011	9:19:35 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:19:35 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:19:35 AM	Tube furnace set to 0
4/24/2011	9:22:59 AM	BCl3 valve closed
4/24/2011	9:22:59 AM	PH3 valve closed
4/24/2011	9:22:59 AM	SiCl4 pre valve closed
4/24/2011	9:22:59 AM	SiCl4 post valve closed
4/24/2011	9:22:59 AM	Main Vac valve closed
4/24/2011	9:22:59 AM	Bypass valve closed
4/24/2011	9:22:59 AM	Helium valve opened
4/24/2011	9:22:59 AM	H2 valve opened
4/24/2011	9:22:59 AM	Bubbler valve opened
4/24/2011	9:22:59 AM	Helium MFC set to  47.500000
4/24/2011	9:22:59 AM	H2 MFC set to  2.500000
4/24/2011	9:22:59 AM	BCl3 MFC set to  0.000000
4/24/2011	9:22:59 AM	PHl3 MFC set to  0.000000
4/24/2011	9:22:59 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:22:59 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:22:59 AM	Tube furnace set to 350
4/24/2011	9:23:00 AM	Helium valve closed
4/24/2011	9:23:00 AM	H2 valve closed
4/24/2011	9:23:00 AM	BCl3 valve closed
4/24/2011	9:23:00 AM	PH3 valve closed
4/24/2011	9:23:00 AM	SiCl4 pre valve closed
4/24/2011	9:23:00 AM	SiCl4 post valve closed
4/24/2011	9:23:00 AM	Main Vac valve closed
4/24/2011	9:23:00 AM	Bubbler valve closed
4/24/2011	9:23:00 AM	Bypass valve closed
4/24/2011	9:23:00 AM	Helium MFC set to  0.000000
4/24/2011	9:23:00 AM	H2 MFC set to  0.000000
4/24/2011	9:23:00 AM	BCl3 MFC set to  0.000000
4/24/2011	9:23:00 AM	PHl3 MFC set to  0.000000
4/24/2011	9:23:00 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:23:00 AM	Bypass solenoid MFC set to  760.000000
4/24/2011	9:23:00 AM	Tube furnace set to 0
4/24/2011	9:23:00 AM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
4/24/2011	9:23:10 AM	Run aborted at 9:23 AM
4/24/2011	9:23:21 AM	Recipe started at 9:23 AM
4/24/2011	9:23:21 AM	BCl3 valve closed
4/24/2011	9:23:21 AM	PH3 valve closed
4/24/2011	9:23:21 AM	SiCl4 pre valve closed
4/24/2011	9:23:21 AM	SiCl4 post valve closed
4/24/2011	9:23:21 AM	Main Vac valve closed
4/24/2011	9:23:21 AM	Bypass valve closed
4/24/2011	9:23:21 AM	Bubbler valve closed
4/24/2011	9:23:21 AM	Helium valve opened
4/24/2011	9:23:21 AM	H2 valve opened
4/24/2011	9:23:21 AM	Helium MFC set to  190.000000
4/24/2011	9:23:21 AM	H2 MFC set to  10.000000
4/24/2011	9:23:21 AM	BCl3 MFC set to  0.000000
4/24/2011	9:23:21 AM	PHl3 MFC set to  0.000000
4/24/2011	9:23:21 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:23:21 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:23:21 AM	Tube furnace set to 0
4/24/2011	9:23:29 AM	BCl3 valve closed
4/24/2011	9:23:29 AM	PH3 valve closed
4/24/2011	9:23:29 AM	SiCl4 pre valve closed
4/24/2011	9:23:29 AM	SiCl4 post valve closed
4/24/2011	9:23:29 AM	Main Vac valve closed
4/24/2011	9:23:29 AM	Bypass valve closed
4/24/2011	9:23:29 AM	Helium valve opened
4/24/2011	9:23:29 AM	H2 valve opened
4/24/2011	9:23:29 AM	Bubbler valve opened
4/24/2011	9:23:29 AM	Helium MFC set to  47.500000
4/24/2011	9:23:29 AM	H2 MFC set to  2.500000
4/24/2011	9:23:29 AM	BCl3 MFC set to  0.000000
4/24/2011	9:23:29 AM	PHl3 MFC set to  0.000000
4/24/2011	9:23:29 AM	SiCl4 MFC set to  0.000000
4/24/2011	9:23:29 AM	Bypass solenoid MFC set to  0.000000
4/24/2011	9:23:29 AM	Tube furnace set to 350
4/24/2011	10:17:45 PM	Run aborted at 10:17 PM
4/24/2011	10:17:45 PM	Helium valve closed
4/24/2011	10:17:45 PM	H2 valve closed
4/24/2011	10:17:45 PM	BCl3 valve closed
4/24/2011	10:17:45 PM	PH3 valve closed
4/24/2011	10:17:45 PM	SiCl4 pre valve closed
4/24/2011	10:17:45 PM	SiCl4 post valve closed
4/24/2011	10:17:45 PM	Bypass valve closed
4/24/2011	10:17:45 PM	Main Vac valve closed
4/24/2011	10:17:45 PM	Bubbler valve closed
4/24/2011	10:17:45 PM	Helium MFC set to  0.000000
4/24/2011	10:17:45 PM	H2 MFC set to  0.000000
4/24/2011	10:17:45 PM	BCl3 MFC set to  0.000000
4/24/2011	10:17:45 PM	PHl3 MFC set to  0.000000
4/24/2011	10:17:45 PM	SiCl4 MFC set to  0.000000
4/24/2011	10:17:45 PM	Tube furnace set to 0
4/24/2011	10:23:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/24/2011	10:23:31 PM	Recipe started at 10:23 PM
4/24/2011	10:23:31 PM	Helium valve closed
4/24/2011	10:23:31 PM	H2 valve closed
4/24/2011	10:23:31 PM	BCl3 valve closed
4/24/2011	10:23:31 PM	PH3 valve closed
4/24/2011	10:23:31 PM	SiCl4 pre valve closed
4/24/2011	10:23:31 PM	SiCl4 post valve closed
4/24/2011	10:23:31 PM	Main Vac valve closed
4/24/2011	10:23:31 PM	Bubbler valve closed
4/24/2011	10:23:31 PM	Bypass valve opened
4/24/2011	10:23:31 PM	Helium MFC set to  0.000000
4/24/2011	10:23:31 PM	H2 MFC set to  0.000000
4/24/2011	10:23:31 PM	BCl3 MFC set to  0.000000
4/24/2011	10:23:31 PM	PHl3 MFC set to  0.000000
4/24/2011	10:23:31 PM	SiCl4 MFC set to  0.000000
4/24/2011	10:23:31 PM	Bypass solenoid MFC set to  0.000000
4/24/2011	10:23:31 PM	Tube furnace set to 0
4/24/2011	10:24:02 PM	Helium valve closed
4/24/2011	10:24:02 PM	H2 valve closed
4/24/2011	10:24:02 PM	BCl3 valve closed
4/24/2011	10:24:02 PM	PH3 valve closed
4/24/2011	10:24:02 PM	SiCl4 pre valve closed
4/24/2011	10:24:02 PM	SiCl4 post valve closed
4/24/2011	10:24:02 PM	Bubbler valve closed
4/24/2011	10:24:02 PM	Main Vac valve opened
4/24/2011	10:24:02 PM	Bypass valve opened
4/24/2011	10:24:02 PM	Helium MFC set to  0.000000
4/24/2011	10:24:02 PM	H2 MFC set to  0.000000
4/24/2011	10:24:02 PM	BCl3 MFC set to  0.000000
4/24/2011	10:24:02 PM	PHl3 MFC set to  0.000000
4/24/2011	10:24:02 PM	SiCl4 MFC set to  0.000000
4/24/2011	10:24:02 PM	Bypass solenoid MFC set to  0.000000
4/24/2011	10:24:02 PM	Tube furnace set to 0
4/24/2011	10:24:03 PM	Run finished at 10:24 PM
4/24/2011	10:24:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
